High performance micro-acoustic chip material-piezoelectric single crystal thinfilm4/6 inch piezoelectric thin film(LN LT)handle waferSi/SiC/Sapphiresize4/6/8device layerLTLNthickness200nm~1umHigh speed optical chip materials-Silicon-based lithium niobate single crystal film4inch thin film lithium niobatestructureLN/Ox/Sisize4 inchthickness300nm~6oonm